申論 6下圖是一個典型的離子佈植機的架構，請說明圖中Analyzing magnet、Accelerationtube、y-axis scanner 的作用。（15 分）+ -180 KVEquipmentNeutral beam trapground Beam trap andNeutralResolving aperture and beam gategate plate and beampath gate90°FocusAnalyzing Accelerationmagnet y-axistubescanner x-axisWafer inscanner wafer proIonchambersource 40 kV VacuumTerminalground system